Citation:
Moustakas, T. D. ; Weitz, D. A. ; Prestridge, E. B. ; Friedman, R. Structural Studies of Microcrystalline Silicon Films Produced by Sputtering . Symposium F – Plasma Synthesis and Etching of Electronic Materials, 1985, 38, 401-407. Copy at http://www.tinyurl.com/yf3ftu9n