@proceedings {1599256,
	title = {Structural Studies of Microcrystalline Silicon Films Produced by Sputtering },
	journal = {Symposium F {\textendash} Plasma Synthesis and Etching of Electronic Materials},
	volume = {38},
	year = {1985},
	pages = {401-407},
	publisher = {MRS Online Proceedings Library},
	url = {https://www.cambridge.org/core/journals/mrs-online-proceedings-library-archive/article/abs/structural-studies-of-microcrystalline-silicon-films-produced-by-sputtering/FD891ADABEDF49773A0DBC9079A46D9B},
	author = {Moustakas, T.D. and Weitz, D. A. and Prestridge, E.B. and Friedman, R.}
}
